Evaporation Source



SHMT not only can supply qualified coating materials and sputtering targets, but also do perfect boat and crucible for vacuum coating industry. Our boat and crucible are made from high purity W, Mo, Ta, Nb and ceramic with tailor-made size and shape. The remarkable property and long life contribute to attain nice coating result and save the expensive cost.


Mo, W, Ta, Nb crucible (other tailor-made size is available)

Material
W
Mo & Mo alloys
Ta
Product
W crucible
Mo crucible
Ta crucible
Size(mm)
Max
Diameter
240
600
240
600
230
250
230
Height
320
400
320
500
50
300
110
Thickness
15
5
15
5
1.5
5
2.5
Min
Diameter
60
60
60
60
60
60
60
Height
60
80
80
80
5
150
20
Thickness
6
1.5
6
1.5
0.2
1
0.5


W, Mo, Ta, Nb boat (other tailor-made size is available)

Shape
Material
W& W alloys
Mo & Mo alloys
Ta
Rectangle(mm)
Length
50-450
50-100
50-450
Width
15-200
15-200
15-200
Height
10-200
10-200
10-200
Square(mm)
Side
50-200
50-200
50-200
Height
10-200
10-200
10-200
Trapezoid(mm)
Side
50-200
Base
20-150
Length
50-400
Height
20-100
Semicircle(mm)
Diamenter
20-100
Circumference
100-450
Hexagon(mm)
Side to side
180X180
Height
16-50
Boat shapped(mm)
Length
80-150
Width
10-60


Evaporation Ceramic Boat



Normal size table (Other tailor-made sizes are also available):

Specification
L
B
H
Trough Size
L1
B1
H1
Size
Toler ance
Size
Toler ance
Size
Toler ance
Size
Toler ance
Size
Toler ance
Size
Toler ance
105*20*10
105
0.5
20
-0.1
10
0.1
C
80
1.5
14
-0.3
1.5
0.15
105*30*10
105
30
10
C
85
24
1.5
110*7*5
110
7
5
C
60
4
2.5
110*16*9
110
16
9
C
85
10
1.2
110*20*10
110
20
10
C
85
14
1.5
110*26*10
110
26
10
C
70
20
1.5
120*24*10
120
24
10
C
90
18
1.5
120*30*10
120
30
10
C
90
24
1.5
120*35*10
120
35
10
C
85
29
1.5
125*30*10
125
30
10
C
101
24
1.5
130*30*10
130
30
10
C
110
24
1.5
130*35*10
130
35
10
C
110
29
1.5
150*30*10
150
30
10
C
130
24
1.5

Density:2.8 ~ 3.2 g/cm3
Resistivity:200~2000K/cm
Working Conditions:
Electric current:400~900A
Operating voltage:5~15V
Temperature:1300 ~1750
Evaporation speed:0.3~0.5g/min/cm2

For other boat and crucible products not specified above, please feel free to directly contact us for specification and supply.